Sponsoring and Exhibition

EBARA

Since its foundation in 1912 as a pump manufacturer, EBARA has continued to think about the future of people, society, and the environment through manufacturing.

Today, we meet our customers’ needs in five businesses, namely our Pumps Business, Compressors and Turbines Business, Chillers Business, Environmental Plants Business, and Precision Machinery Business. By supporting the social infrastructure that is essential to everyday life and to industry throughout the world in each of our business domains, the EBARA Group will contribute to solutions to environmental and energy issues and to the development of advanced technologies.

Contact:
Kaori SATO
Marketing Department, Advanced Technology Division
Precision Machinery Company
EBARA CORPORATION 
Kanagawa, Japan  251-8502
E-mail: sato.kaori@ebara.com
www.ebara.co.jp/en/

At 3M, we’re redefining CMP with innovative pads and pad conditioners. A trusted supplier with more than 25 years in the CMP market, we’re here to address a range of process needs including improved consistency, reduced variability, improved planarization performance, contamination and defectivity control, higher yield, and longer consumable lifetime.  Whether you’re working on legacy nodes or the latest advanced nodes, 3M CMP Materials are ready to perform.

3M™ Trizact™ CMP Pads - Choose to redefine your CMP process with 3M™ Trizact™ CMP Pads. These advanced pads help you achieve consistent pad-to-pad performance, limit metal contamination risks and help you provide paradigm-shifting high planarization efficiency and low defect performance.

3M™ CMP Pad Conditioners - From the exclusive sintered abrasive diamond technology behind 3M™ Diamond Pad Conditioners to the precisely micro replicated patterns in 3M™ Trizact™ Pad Conditioners, our global technical team is committed to continually redefining the cutting edge of CMP polishing pad conditioner technology. Research and manufacturing facilities around the world provide convenient product support and product supplies. Our pad conditioners work with many common combinations of pad hardness and density. See what works best for you, or let our technical team test a custom specification.

3M™ Trizact™ Composite Pad and Slurry - 3M™ Trizact™ Composite Slurry and Pad products were developed as an alternative to the copper composite platen and diamond slurry process (Cu DMP) for lapping and finishing hard, crystalline materials like silicon carbide and sapphire wafers. See how they combine good total thickness variation with high removal rate and ease of use.

Contact:

Paul Shepherd Ph.D. | EMEA Area Segment Manager - Semiconductor
Electronics Materials Solutions Division
3M United Kingdom PLC
3M Technical Centre, Ratcliffe Road, Atherstone, Warwickshire, CV9 1PJ
Office: +44 (0)1827 710204 | Mobile: +44 (0)7768 537847

Merck Company Profile

At Merck, science is at the heart of everything we do. It drives the discoveries we make and the technologies we create. With a global presence in 66 countries and over 100 years in the electronic materials business, we are inside almost every consumer electronics device. We're leveraging artificial intelligence, machine learning, and big data to offer a best-in-class portfolio.

Our Electronics product and service portfolio has been designed to enable the future of electronics in our data-driven world. We are advancing the semiconductor industry and covering the entire value chain to provide customers with end-to-end solutions.

As a leading materials solution provider, we are uniquely positioned in the semiconductor manufacturing value chain. Nearly all stages in the semiconductor fabrication process use our products or delivery systems.

Our semiconductor materials unlock the potential for smaller, faster, and more energy-efficient devices & through our delivery systems and support services, we advance customers’ superior distribution and storage of specialty chemicals and gases with the utmost safety.

Discover how we accelerate semiconductor innovation at https://bit.ly/MerckSemiconductorsSolutions.

Contact:
Andrea Valencia
Marketing Communications and Events
Semiconductor Materials

EMD Electronics
A business of Merck KGaA, Darmstadt, Germany
andrea.valencia@emdgroup.com

ProSys is the leading specialist in megasonic enhanced processing for single substrate and batch applications. With an install base of over 4000 systems, we help customers improve processes such as:

• FEOL/BEOL cleaning
• Post-CMP-, Pre-Bond-, and Mask cleaning
• TSV/VIA cleaning
• Resist Strip/Develop
• Metal Lift-Off
• Adhesive removal
• Post-Dicing cleaning (Saw, Laser, Plasma)

Operating parameters and transducer status of all ProSys systems are measured and controlled in real-time. Our ProSys MegPie™ is the industry standard for sub 20 nm cleaning in high volume device manufacturing thanks to an unmatched cleaning efficiency and uniformity. Our direct batch systems help increase cleaning efficiency, throughput, and reduce tool downtime without the need for active cooling.

Igor Eichinger
Product Systems Inc.
Saegewerkstrasse 3, 83395 Freilassing – Germany
Email: eichinger@prosysmeg.de
Web: www.prosysmeg.com

ACCRETECH (Europe) GmbH

From the very beginning, our customers’ needs and our passion for new technologies have determined our actions.

Intrinsic driven by achieving perfection and reliability, we develop high technology systems and machines for the semiconductor manufacturing industry, supporting our customers in fierce international competition.

Now for more than 70 years in Japan and since 1989 in the European market, Accretech’s partnership has been famous for wafer manufacturing solutions and has been the market leader in relevant product segments since that time.

Visit our website to learn more about our products and services: www.accretech.eu

DuPont Company Profile

DuPont Electronics & Industrial is a global supplier of new technologies and performance materials serving the semiconductor, circuit board, display, digital and flexographic printing, healthcare, aerospace, industrial, and transportation industries. From advanced technology centers worldwide, teams of talented research scientists and application experts work closely with customers, providing solutions, products and technical service to enable next-generation technologies.

Our rich history of experience and innovation has deep roots in the semiconductor fabrication industry with a broad portfolio and expertise that support many segments, from advanced chip manufacturing processes, to advanced packaging and assembly, to compound semiconductor device fabrication.

We offer complementary, reliable, high-quality materials sets to support both today’s high-volume manufacturing processes and advanced technology for the future. Through close collaboration with our customers, we develop solutions to address leading-edge technology challenges that are critical to advancing diverse market drivers. We work with our customers to develop or place materials that meet their specific needs, including technical performance and cost-of-ownership improvements.

Our materials are valuable building blocks for today’s advanced microelectronics found in everything from consumer electronics to high-end data centers, automotive applications, medical devices, the Internet of Things, artificial intelligence, power electronics and more. 

For more information on DuPont™ semiconductor fabrication and packaging products, please visit our website: electronics.dupont.com

DuPont Website Link:
https://www.dupont.com/electronic-materials.html/

The name EHWA Diamond has stood for the highest quality in the field of CBN and diamond tools since 1975. In this sector, we are one of the largest producers of diamond and CBN tools in the world.

We supply small, medium, and large companies with the entire range of customized CBN- and diamond tools, particularly in the semiconductor manufacturing sector, where we provide our customers with high-quality backgrinding wheels, CMP pad conditioners, and micro blades. EHWA products are valued worldwide for their top-notch and consistent quality at competitive prices.

Contact:
EHWA Europe GmbH
Fatih Genc
genc@ehwadia.de
http://ehwadia.com/about_semiconductor_2023/

Entegris, Inc. (NASDAQ: ENTG) is a leading supplier of advanced materials and process solutions for the semiconductor, life sciences, and other high-tech industries. For over 50 years, we have been committed to solving our customers’ most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge.

Entegris has ~ 8000 employees throughout its throughout its global operations and is ISO 9001 certified. It has manufacturing, customer service, and/or research facilities throughout United States, Canada, China, Germany, Israel, Japan, Malaysia, Singapore, South Korea, Taiwan, and the United Kingdom. Our highly skilled team members, facilities and resources are right where you need them in order to help you solve your most advanced technology challenges.

Contact:
Scott Moroney
Senior Manager, Solutions Marketing - Microcontamination Control
Global Marketing
scott.moroney@entegris.com

Company Profile of Kuraray

Kuraray was founded in 1926 for the purpose of commercializing synthetic rayon, which was cutting-edge technology at the time. The Company has continued to expand since then, keeping a focus on fibers and textiles. Following the eventual transition of fiber and textile production overseas and other changes to the business environment, Kuraray expanded to chemical products and drew on its accumulated base of unique technologies in polymer and synthetic chemistry.

Polishing  pads  for  semiconductors  are  made  of  high-hardness  polyurethane,  a  new  material developed  by  leveraging  the  polyurethane  design  and  manufacturing  technologies  cultivated through the development of our unique man-made leather. 

“Kuraray  CMP  pad”  feature  high  hardness  &  poreless  structure  with  excellent  properties  to polish and planarize devices, very low scratch formation despite their high hardness, and long hours of duration due to their excellent abrasion resistance.

For more detailed information, please see https://www.kuraray.com/

Takashi Sugioka
poreless.cmppad@kuraray.com

Levitronix®

develops, markets, and sells ultrapure pump systems, mixers, blowers, flow sensors and flow control systems to the Semiconductor Industry. Levitronix® products are based on magnetically levitated bearingless motor technology, which allows for contact-free, and thus, particle-free operation.

With no mechanical wear, Levitronix® pumps are ideal for CMP slurry handling, metal plating processes, wet cleaning and etching, and high purity fluid transfer and delivery. Levitronix® pumps deliver continuous flow allowing for precise electronic control of flow and pressure.

The Levitronix® pump systems are designed for ultrapure fluid applications where extremely low particle shedding and metal contamination are required. Tests conducted by an independent laboratory prove that particle generation from a Levitronix® pump is significantly less than that from diaphragm pumps. Comparative tests among Levitronix®, bellows and diaphragm pumps, conducted with CMP slurries, showed the Levitronix® pumps producing 200-1,000 times fewer large particles which can scratch and damage wafers.

Founded in 1991, SONOTEC GmbH has developed into one of the world's leading product and solution specialist for innovative measurement technologies. With more than 200 employees and a modern corporate structure comprising three independent business units – Non-Invasive Fluid Monitoring, Preventive Maintenance and Nondestructive Testing - the technology leader operates its global sales activities from the Halle (Saale) based German headquarter. The distributed portfolio includes customized ultrasonic transducers and sensors as well as testing devices and measurement solutions for a variety of different industries.

Stable and highly accurate flow measurement is essential for many semiconductor manufacturing steps. Non-contact clamp-on flow meters have proven to fulfill this demanding task reliably. The ultrasonic sensors measure through the wall of the tube or pipe and substantially reduce the risk of contamination or leakage of hazardous fluids. With the SEMIFLOW flow meter series, the ultrasound specialist SONOTEC has developed metal-free contactless flow meters particularly designed for the requirements in the semiconductor industry – also for hazardous environments. The compact sensors with integrated electronics board are available in multiple sizes suitable for all common rigid plastic tubes and pipes used in fabs.

Contact:
Daniela Treptow
Marketing Manager | Non-Invasive Fluid Monitoring
Daniela.Treptow@sonotec.de

S3 Alliance

provides the network, and product portfolio that brings leading edge solutions to our customers. Our supply and service solutions are tailored to meet our customers ever changing requirements, enabling them to be competitive in what is now a truly global marketplace. For the semiconductor/MEMS market we source and offer following quality products at the right price:

• Equipment: new and remanufactured CMP, Backgrinding, Taping-Detaping-Mounting, Scribe and Break, ALD and Cleaning, Plasma Etch, RIE, ICP, Asher, Descuum, PECVD, Ultrasonic Spray Coating, Spin Coating, CPD (Critical Point Dryer).
• Metrology and Automation: EFEM, Wafer Loaders, Flat/Notch Aligners, manual handling Tools, Thickness measurement, H2 Impurity Measurement, UV Lights, Ultrasonic Flow measurement, Scanning Electronic Microscope (SEM)
• Parts & Consumables: Retaining Ring, Diamond Conditioners, CMP Pads, Grinding Wheels, Shipping boxes (new and reconditioned), Cassettes (PFA, PP, PE, PEEK), O-ring replacement for Kalrez; CMP Parts, Chamber Cleaning Materials, Chemical and DIW Heaters, Chemical Pumps.
• Services: Robot repair for Yaskawa, Kawasaki, Brooks, PRI, Equip and Genmark. LFM repair Cryo Pumps repair and refurbishment, Power supply repair. Cleaning solutions: Cleaning pads and kits for all type of chambers, Microfiber wipers.

Fäth Group

As a leading company in the semiconductor industry, Fäth Group has developed an innovative, patented recycling plant.

This facility uses an advanced ultrafiltration process to recover ultrapure water and chemical raw materials from a mixture of wastewater and chemicals. Through several complex filtration and ultrafiltration stages, the mixture is effectively separated and processed for reuse in the production process.

This method represents a forward-thinking and environmentally friendly approach in semiconductor technology, highlighting Fäth Group's leadership in innovation.

Anna Wurbs
Content Marketing Manager
https://www.faeth.com/

3M's healthcare business is now a standalone company, Solventum. 

At Solventum, we enable better, smarter, safer healthcare to improve lives. As a new company with a long legacy of creating breakthrough solutions for our customers’ toughest challenges, we pioneer game-changing innovations at the intersection of health, material and data science.

The Purification and Filtration segment, formerly Separation and Purification Sciences, is a provider of purification and filtration solutions that are designed and marketed for use in the manufacturing processes of biopharma and medical technologies as well as in the manufacturing of microelectronics, food and beverage products, and water filtration for commercial and residential applications. 

We are dedicated to advancing membrane science to enable life-saving treatments and cleaner water by leveraging our technical expertise in functionalizing membranes and deep expertise in process filtration. Our specialized personnel work closely with manufacturing and process development professionals to consistently provide high quality products, support and education. 

Solventum purification products increase efficiency and help your innovations go from idea to full-scale production — fast. 

Contact: Cristina Paterna

EMEA Events & Fairs Responsible
Purification and Filtration & Health Information Systems
E-Mail: cpaterna@solventum.com
www.Solventum.com

SPS International

Every day, you are being challenged, to create smaller and more powerful microchips in the cleanest and most cost-efficient way possible. With our expertise in wafer handling tools and wet process equipment, SPS International offers you a wide range of semiconductor equipment products and customized solutions for all your major process steps.

Do you want to extend the life-time of your process semiconductor equipment? Upgrade your CMP tool? SPS International works closely with OEM’s, Wafer Fabs and R&D institutes worldwide. Supported by our own full-time service engineers and our experienced sales staff we offer you >35 years of excellent wafer process technology know-how.

Our mission is to be your one-stop source for high value semiconductor production systems and consumables, used in semiconductor fabrication, MEMS & Biotechnology.

Contact:
Jorien van Montfrans, PR / Marketing
Email: jorien.vanmontfrans@sps-international.com
Our website: https://www.sps-international.com/

TSI® stands as a global leader in providing precision measurement instruments and solutions for a diverse range of industries, including semiconductor manufacturing. With a rich history of innovation and a commitment to excellence, TSI® has become a trusted partner in advancing technologies and processes crucial for industries like planarization and chemical mechanical planarization (CMP).

TSI's expertise in semiconductor manufacturing encompasses a comprehensive suite of solutions tailored to help overcome the challenges of working at nanoscale level. Our precision instruments play a critical role in optimizing processes such as planarization and CMP, ensuring the production of high-quality semiconductor devices.

For more information about TSI® and our solutions for semiconductor manufacturing, please visit our booth at ICPT 2024 or contact us directly.

Vibrantz Technologies

has a 300-year combined legacy of innovation in advanced materials, color solutions and performance coatings. Our core competencies in particle engineering, color technology and glass and ceramic science have made us the standalone leader in specialty chemicals and materials solutions.

We are a leading supplier of specialty mineral additives and electronic and battery materials, delivering value from source to solution. Our expertise includes silicon carbide wafer polishing and CMP slurries, offering innovative solutions to clients of all sizes.

We excel in providing customized solutions tailored to meet diverse project needs.
Additionally, we are one of the largest global producers of fine manganese chemicals and have over 70 years of experience in the oil and gas industry.

Daryl Florgan 
Senior Account Manager, Surface Technologies – Electronics 
CMP wafer polishing and SiC product development
daryl.florgan@vibrantz.com