call for papers
Copyright: Tobias Ritz

Call for Papers

New abstract submission deadline: May 19, 2024

Information briefly in advance

Below, please find information for authors of the ICPT2024 Conference.

Watch out: Deadline for the submission of abstracts is May 19, 2024.
Here is the link for the submission of abstracts.

This highlighted link leads to the typing instructions for abstracts.

Important dates



New!!! Abstract submission deadline

May 19, 2024

Notification of acceptance deadline 

July 1, 2024

Extended abstract submission deadline

September 1, 2024

ICPT Conference 2024

October 15-18, 2024

Conference Topics

ICPT 2024 provides the largest forum for academic researchers, industrial practitioners, and engineers from around the world dedicated to the exchange of information on the state-of-the-art in Chemical Mechanical Polishing (CMP) and other planarization technologies.

Abstracts of new work are requested and can include the following topics relating to planarization:

•    Defects, reliability issues and Post CMP cleaning
•    CMP fundamentals, modeling and simulation
•    Equipment, process control and metrology
•    Emerging and alternative CMP technologies 
•    CMP consumables
•    3D ICs/TSV/packaging applications
•    CMP for MEMS and hybrid applications
•    Substrate polish such as Si, SiC, GaN and Diamond

Information for Authors

The submitted manuscript should be original, it may not have formally been published elsewhere and it may not be under consideration by any other journal or conference; it furthermore must not infringe any existing copyright or the rights of any other third parties.


The length of the abstracts should be one page of text and one additional page for figures, measurement results and drawings. Abstract language is English. The student papers can be selected in the klickbox. 

Abstracts will be scored on the originality and significance of the work and the quality of the information and data presented. The ideal abstract will be for novel work in an area of great importance to the industry and will include the data to support the conclusions drawn. When submitting your abstract, please indicate your preference for oral or poster presentation and the targeted topic area.

Extended abstracts

After notification of acceptance of the abstract, authors must submit the extended abstract. Extended abstracts, including figures and references, will be limited to 4-8 pages for oral presenters and 3-4 pages for poster presenters. The full text of oral and poster presentations will be published in an electronic format to be determined and will be available to all participants.


Presentation of accepted abstracts at the conference must be in English. For Poster Presentations, the desired format is DIN A0 (840 mm x 1200 mm). 

Submission Guidelines

Paper formatting guideline: It is recommended to use the VDE templates (see download) for preparing the manuscript.